P

Inventor

KON YOSHIMITSU

JP6 patents
⚠️ This page may combine multiple inventors who share the name “KON YOSHIMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents
US11264248B2Mar 1, 2022

Etching method and substrate processing apparatus

TOKYO ELECTRON LTD0 citations53
US11121001B2Sep 14, 2021

Method of etching, device manufacturing method, and plasma processing apparatus

TOKYO ELECTRON LTD0 citations45
US12476079B2Nov 18, 2025

Plasma processing method and plasma processing apparatus

TOKYO ELECTRON LTD0 citations44
US12394632B2Aug 19, 2025

Plasma processing method and plasma processing system

TOKYO ELECTRON LTD0 citations44

SATO MANABU

1 patent
US8128831B2Mar 6, 2012

Plasma etching method and computer-readable storage medium

SATO MANABU50 citations92

KON YOSHIMITSU

1 patent
US8216485B2Jul 10, 2012

Plasma etching method, plasma etching apparatus, control program and computer-readable storage medium

KON YOSHIMITSU2 citations54