P

Inventor

LEE CHEOL-KYU

KR15 patents
⚠️ This page may combine multiple inventors who share the name “LEE CHEOL-KYU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

11 patents
US7402488B2Jul 22, 2008

Method of manufacturing a semiconductor memory device

SAMSUNG ELECTRONICS CO LTD13 citations84
US7728375B2Jun 1, 2010

Semiconductor memory device and method of forming the same

SAMSUNG ELECTRONICS CO LTD10 citations83
US7226867B2Jun 5, 2007

Method of etching a metal layer using a mask, a metallization method for a semiconductor device, a method of etching a metal layer, and an etching gas

SAMSUNG ELECTRONICS CO LTD7 citations73
US6479390B1Nov 12, 2002

Method of etching material film formed on semiconductor wafer using surface wave coupled plasma etching apparatus

SAMSUNG ELECTRONICS CO LTD7 citations72
US7763544B2Jul 27, 2010

Method of forming fine pattern of semiconductor device using sige layer as sacrificial layer, and method of forming self-aligned contacts using the same

SAMSUNG ELECTRONICS CO LTD5 citations62
US7566659B2Jul 28, 2009

Method of forming fine pattern of semiconductor device using SiGe layer as sacrificial layer, and method of forming self-aligned contacts using the same

SAMSUNG ELECTRONICS CO LTD2 citations62
US7118926B2Oct 10, 2006

Method of optimizing seasoning recipe for etch process

SAMSUNG ELECTRONICS CO LTD4 citations61
US6228210B1May 8, 2001

Surface wave coupled plasma etching apparatus

SAMSUNG ELECTRONICS CO LTD5 citations61
US7329574B2Feb 12, 2008

Methods of forming capacitor electrodes using fluorine and oxygen

SAMSUNG ELECTRONICS CO LTD0 citations52
US7879726B2Feb 1, 2011

Methods of forming semiconductor devices using selective etching of an active region through a hardmask

SAMSUNG ELECTRONICS CO LTD1 citations51
US7879703B2Feb 1, 2011

Method of fabricating semiconductor device for reducing thermal burden on impurity regions of peripheral circuit region

SAMSUNG ELECTRONICS CO LTD1 citations51

REPUBLIC OF KOREA NATIONAL DISASTER MANAGEMENT RES INSTITUTE

2 patents

NAT DISASTER MANAGEMENT RES INST

2 patents