Inventor
LEE CHEOL-KYU
KR15 patents
⚠️ This page may combine multiple inventors who share the name “LEE CHEOL-KYU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
11 patentsUS7402488B2Jul 22, 2008
Method of manufacturing a semiconductor memory device
SAMSUNG ELECTRONICS CO LTD13 citations84
US7728375B2Jun 1, 2010
Semiconductor memory device and method of forming the same
SAMSUNG ELECTRONICS CO LTD10 citations83
US7226867B2Jun 5, 2007
Method of etching a metal layer using a mask, a metallization method for a semiconductor device, a method of etching a metal layer, and an etching gas
SAMSUNG ELECTRONICS CO LTD7 citations73
US6479390B1Nov 12, 2002
Method of etching material film formed on semiconductor wafer using surface wave coupled plasma etching apparatus
SAMSUNG ELECTRONICS CO LTD7 citations72
US7763544B2Jul 27, 2010
Method of forming fine pattern of semiconductor device using sige layer as sacrificial layer, and method of forming self-aligned contacts using the same
SAMSUNG ELECTRONICS CO LTD5 citations62
US7566659B2Jul 28, 2009
Method of forming fine pattern of semiconductor device using SiGe layer as sacrificial layer, and method of forming self-aligned contacts using the same
SAMSUNG ELECTRONICS CO LTD2 citations62
US7118926B2Oct 10, 2006
Method of optimizing seasoning recipe for etch process
SAMSUNG ELECTRONICS CO LTD4 citations61
US6228210B1May 8, 2001
Surface wave coupled plasma etching apparatus
SAMSUNG ELECTRONICS CO LTD5 citations61
US7329574B2Feb 12, 2008
Methods of forming capacitor electrodes using fluorine and oxygen
SAMSUNG ELECTRONICS CO LTD0 citations52
US7879726B2Feb 1, 2011
Methods of forming semiconductor devices using selective etching of an active region through a hardmask
SAMSUNG ELECTRONICS CO LTD1 citations51
US7879703B2Feb 1, 2011
Method of fabricating semiconductor device for reducing thermal burden on impurity regions of peripheral circuit region
SAMSUNG ELECTRONICS CO LTD1 citations51
REPUBLIC OF KOREA NATIONAL DISASTER MANAGEMENT RES INSTITUTE
2 patentsUS12087148B2Sep 10, 2024
Disaster situation communication network infrastructure supplementation method and system using unmanned mobile device
REPUBLIC OF KOREA NATIONAL DISASTER MANAGEMENT RES INSTITUTE1 citations59
US12081911B2Sep 3, 2024
Buried person search device using detachable module
REPUBLIC OF KOREA NATIONAL DISASTER MANAGEMENT RES INSTITUTE1 citations59
NAT DISASTER MANAGEMENT RES INST
2 patentsUS12260656B2Mar 25, 2025
Method and apparatus for estimating size of damage in the disaster affected areas
NAT DISASTER MANAGEMENT RES INST0 citations47
US12154311B2Nov 26, 2024
Method and apparatus for identifying disaster affected areas using disaster prone areas features
NAT DISASTER MANAGEMENT RES INST0 citations47