Inventor

KANZAWA HIDEYUKI

JP3 patents

Patents

3 patents

US7410897B2Aug 12, 2008

Contact plug processing and a contact plug

SHARP KK9 citations77

US7169682B2Jan 30, 2007

Method for manufacturing semiconductor device

SHARP KK8 citations71

US7122903B2Oct 17, 2006

Contact plug processing and a contact plug

SHARP KK1 citations45