Inventor
TREGUB ALEXANDER
US10 patents
⚠️ This page may combine multiple inventors who share the name “TREGUB ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
9 patentsUS7383723B2Jun 10, 2008
Detecting particle agglomeration in chemical mechanical polishing slurries
INTEL CORP22 citations92
US7469443B2Dec 30, 2008
Brush for cleaning wafer
INTEL CORP11 citations83
US7264853B2Sep 4, 2007
Attaching a pellicle frame to a reticle
INTEL CORP16 citations82
US7314667B2Jan 1, 2008
Process to optimize properties of polymer pellicles and resist for lithography applications
INTEL CORP12 citations79
US7316869B2Jan 8, 2008
Mounting a pellicle to a frame
INTEL CORP5 citations72
US7048610B1May 23, 2006
Conditioning polishing pad for chemical-mechanical polishing
INTEL CORP10 citations68
US8012651B2Sep 6, 2011
Mounting a pellicle to a frame
INTEL CORP2 citations61
US7288299B2Oct 30, 2007
Fullerenes to increase radiation resistance in polymer-based pellicles
INTEL CORP3 citations54
US7288300B2Oct 30, 2007
Fullerenes to increase radiation resistance in polymer-based pellicles
INTEL CORP0 citations43