Inventor
LO FU-CHANG
US7 patents
⚠️ This page may combine multiple inventors who share the name “LO FU-CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
6 patentsUS6607862B2Aug 19, 2003
Damascene extreme ultraviolet lithography alternative phase shift photomask and method of making
INTEL CORP27 citations91
US7264853B2Sep 4, 2007
Attaching a pellicle frame to a reticle
INTEL CORP16 citations82
US7314667B2Jan 1, 2008
Process to optimize properties of polymer pellicles and resist for lithography applications
INTEL CORP12 citations79
US7316869B2Jan 8, 2008
Mounting a pellicle to a frame
INTEL CORP5 citations72
US8012651B2Sep 6, 2011
Mounting a pellicle to a frame
INTEL CORP2 citations61
US7763395B2Jul 27, 2010
Radiation stability of polymer pellicles
INTEL CORP0 citations46