Inventor
ENDO RICK R
US6 patents
Patents
6 patentsUS7334588B2Feb 26, 2008
Method and apparatus for wafer cleaning
APPLIED MATERIALS INC26 citations91
US7451774B2Nov 18, 2008
Method and apparatus for wafer cleaning
APPLIED MATERIALS INC11 citations82
US7819985B2Oct 26, 2010
Method and apparatus for wafer cleaning
APPLIED MATERIALS INC6 citations72
US7836901B2Nov 23, 2010
Method and apparatus for wafer cleaning
APPLIED MATERIALS INC3 citations61
US7205023B2Apr 17, 2007
Method and apparatus for chemical mixing in a single wafer process
APPLIED MATERIALS INC2 citations61
US7290976B2Nov 6, 2007
Semiconductor substrate processing apparatus with a passive substrate gripper
APPLIED MATERIALS INC3 citations58