Inventor
GANGADHARAN SHIBU
US5 patents
⚠️ This page may combine multiple inventors who share the name “GANGADHARAN SHIBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS7204913B1Apr 17, 2007
In-situ pre-coating of plasma etch chamber for improved productivity and chamber condition control
LAM RES CORP92 citations96
US7767584B1Aug 3, 2010
In-situ pre-coating of plasma etch chamber for improved productivity and chamber condition control
LAM RES CORP45 citations95
US7425277B1Sep 16, 2008
Method for hard mask CD trim
LAM RES CORP4 citations60
US7667281B2Feb 23, 2010
Method for hard mask CD trim
LAM RES CORP0 citations49