Inventor
SHIGA MASAYOSHI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “SHIGA MASAYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
4 patentsUS6790287B2Sep 14, 2004
Substrate processing apparatus, substrate inspection method and substrate processing system
DAINIPPON SCREEN MFG26 citations92
US6790286B2Sep 14, 2004
Substrate processing apparatus
DAINIPPON SCREEN MFG24 citations92
US7525650B2Apr 28, 2009
Substrate processing apparatus for performing photolithography
DAINIPPON SCREEN MFG19 citations82
US7665415B2Feb 23, 2010
Substrate processing apparatus
DAINIPPON SCREEN MFG2 citations61