Inventor
ANTILA JARKKO
FI11 patents
⚠️ This page may combine multiple inventors who share the name “ANTILA JARKKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
5 patentsUS8780356B1Jul 15, 2014
Method for determining calibration parameters for a spectrometer
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY9 citations79
US8654347B2Feb 18, 2014
Micromechanical tunable Fabry-Perot interferometer arrangement and a method for producing the same
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY5 citations72
US9772228B2Sep 26, 2017
Device and method for optical measurement of a target
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY2 citations71
US9268144B2Feb 23, 2016
Method for producing a mirror plate for Fabry-Perot interferometer, and a mirror plate produced by the method
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY5 citations68
US9588334B2Mar 7, 2017
Fabry-perot interferometer and a method for producing the same with decreased bending
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY1 citations43
INFICON GMBH
4 patentsUS7305888B2Dec 11, 2007
Optical interferometric pressure sensor
INFICON GMBH25 citations90
US7707891B2May 4, 2010
Optical interferometric pressure sensor
INFICON GMBH9 citations82
US7614308B2Nov 10, 2009
Diaphragm pressure measuring cell arrangement
INFICON GMBH15 citations77
US7500300B2Mar 10, 2009
Optical interferometric pressure sensor manufacturing method
INFICON GMBH7 citations71