Inventor
BJOERKMAN PER
FI11 patents
⚠️ This page may combine multiple inventors who share the name “BJOERKMAN PER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFICON GMBH
9 patentsUS6591687B1Jul 15, 2003
Capacitive vacuum measuring cell
INFICON GMBH61 citations95
US7140085B2Nov 28, 2006
Process for manufacturing a capacitive vacuum measuring cell
INFICON GMBH24 citations92
US7107855B2Sep 19, 2006
Membrane for capacitive vacuum measuring cell
INFICON GMBH20 citations92
US6528008B1Mar 4, 2003
Process for producing membrane for capacitive vacuum measuring cell
INFICON GMBH20 citations92
US7305888B2Dec 11, 2007
Optical interferometric pressure sensor
INFICON GMBH25 citations90
US7536915B2May 26, 2009
Diaphragm vacuum measuring cell and method for the production of such measuring cell
INFICON GMBH9 citations80
US7443169B2Oct 28, 2008
Shield arrangement for a vacuum cell
INFICON GMBH10 citations80
US7614308B2Nov 10, 2009
Diaphragm pressure measuring cell arrangement
INFICON GMBH15 citations77
US7500300B2Mar 10, 2009
Optical interferometric pressure sensor manufacturing method
INFICON GMBH7 citations71