Inventor

HUH SUNGMIN

KR3 patents

⚠️ This page may combine multiple inventors who share the name “HUH SUNGMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

2 patents

US8048595B2Nov 1, 2011

Extreme ultraviolet photomask and methods and apparatuses for manufacturing the extreme ultraviolet photomask

SAMSUNG ELECTRONICS CO LTD2 citations54

US7629087B2Dec 8, 2009

Photomask, method of making a photomask and photolithography method and system using the same

SAMSUNG ELECTRONICS CO LTD4 citations54

JANG ILYONG

1 patent

US8216748B2Jul 10, 2012

Extreme ultraviolet photomask

JANG ILYONG1 citations38