Inventor
SUNG JUNGHWAN
US6 patents
Patents
6 patentsUS7141494B2Nov 28, 2006
Method for reducing tungsten film roughness and improving step coverage
NOVELLUS SYSTEMS INC147 citations98
US7005372B2Feb 28, 2006
Deposition of tungsten nitride
NOVELLUS SYSTEMS INC187 citations98
US7691749B2Apr 6, 2010
Deposition of tungsten nitride
NOVELLUS SYSTEMS INC97 citations97
US7262125B2Aug 28, 2007
Method of forming low-resistivity tungsten interconnects
NOVELLUS SYSTEMS INC91 citations97
US6905543B1Jun 14, 2005
Methods of forming tungsten nucleation layer
NOVELLUS SYSTEMS INC68 citations96
US7107998B2Sep 19, 2006
Method for preventing and cleaning ruthenium-containing deposits in a CVD apparatus
NOVELLUS SYSTEMS INC74 citations94