Inventor
MOON SUNG-TAEK
KR8 patents
Patents
8 patentsUS6479405B2Nov 12, 2002
Method of forming silicon oxide layer in semiconductor manufacturing process using spin-on glass composition and isolation method using the same method
SAMSUNG ELECTRONICS CO LTD75 citations94
US7261621B2Aug 28, 2007
Pad conditioner for chemical mechanical polishing apparatus
SAMSUNG ELECTRONICS CO LTD52 citations91
US7229337B2Jun 12, 2007
Polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting
SAMSUNG ELECTRONICS CO LTD14 citations91
US7442111B2Oct 28, 2008
Polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting
SAMSUNG ELECTRONICS CO LTD8 citations72
US7662022B2Feb 16, 2010
Polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting
SAMSUNG ELECTRONICS CO LTD2 citations61
US7578727B2Aug 25, 2009
Conditioner device for conditioning polishing pad and chemical mechanical polishing apparatus including the same
SAMSUNG ELECTRONICS CO LTD2 citations61
US7402261B2Jul 22, 2008
Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions
SAMSUNG ELECTRONICS CO LTD2 citations61
US8007676B2Aug 30, 2011
Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions
SAMSUNG ELECTRONICS CO LTD0 citations51