Inventor
AHN BONG-SU
KR7 patents
Patents
7 patentsUS7261621B2Aug 28, 2007
Pad conditioner for chemical mechanical polishing apparatus
SAMSUNG ELECTRONICS CO LTD52 citations91
US7578727B2Aug 25, 2009
Conditioner device for conditioning polishing pad and chemical mechanical polishing apparatus including the same
SAMSUNG ELECTRONICS CO LTD2 citations61
US7402261B2Jul 22, 2008
Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions
SAMSUNG ELECTRONICS CO LTD2 citations61
US9333467B2May 10, 2016
Apparatus for manufacturing polishing pad and method of manufacturing polishing pad using the same
SAMSUNG ELECTRONICS CO LTD2 citations59
US11541504B2Jan 3, 2023
Recycled polishing pad
SAMSUNG ELECTRONICS CO LTD0 citations55
US8007676B2Aug 30, 2011
Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions
SAMSUNG ELECTRONICS CO LTD0 citations51
US9458280B2Oct 4, 2016
Polishing pad compound
SAMSUNG ELECTRONICS CO LTD1 citations48