Inventor
KANG KYOUNG-MOON
KR12 patents
⚠️ This page may combine multiple inventors who share the name “KANG KYOUNG-MOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
10 patentsUS7261621B2Aug 28, 2007
Pad conditioner for chemical mechanical polishing apparatus
SAMSUNG ELECTRONICS CO LTD52 citations91
US7229337B2Jun 12, 2007
Polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting
SAMSUNG ELECTRONICS CO LTD14 citations91
US7442111B2Oct 28, 2008
Polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting
SAMSUNG ELECTRONICS CO LTD8 citations72
US7429367B2Sep 30, 2008
Method for producing improved cerium oxide abrasive particles and compositions including such particles
SAMSUNG ELECTRONICS CO LTD3 citations62
US7662022B2Feb 16, 2010
Polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting
SAMSUNG ELECTRONICS CO LTD2 citations61
US7578727B2Aug 25, 2009
Conditioner device for conditioning polishing pad and chemical mechanical polishing apparatus including the same
SAMSUNG ELECTRONICS CO LTD2 citations61
US7402261B2Jul 22, 2008
Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions
SAMSUNG ELECTRONICS CO LTD2 citations61
US8007676B2Aug 30, 2011
Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions
SAMSUNG ELECTRONICS CO LTD0 citations51
US7858527B2Dec 28, 2010
Additive composition, slurry composition including the same, and method of polishing an object using the slurry composition
SAMSUNG ELECTRONICS CO LTD0 citations49
US7288212B2Oct 30, 2007
Additive composition, slurry composition including the same, and method of polishing an object using the slurry composition
SAMSUNG ELECTRONICS CO LTD1 citations49