Inventor

SU TEH-TIEN

US4 patents

⚠️ This page may combine multiple inventors who share the name “SU TEH-TIEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US9972504B2May 15, 2018

Atomic layer etching of tungsten for enhanced tungsten deposition fill

LAM RES CORP21 citations94

US11069535B2Jul 20, 2021

Atomic layer etch of tungsten for enhanced tungsten deposition fill

LAM RES CORP7 citations84

APPLIED MATERIALS INC

1 patent

US7276447B1Oct 2, 2007

Plasma dielectric etch process including ex-situ backside polymer removal for low-dielectric constant material

APPLIED MATERIALS INC24 citations89

DELGADINO GERARDO A

1 patent

US8083963B2Dec 27, 2011

Removal of process residues on the backside of a substrate

DELGADINO GERARDO A10 citations78