Inventor

LEE SI-HYEUNG

KR20 patents

⚠️ This page may combine multiple inventors who share the name “LEE SI-HYEUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE SI-HYEUNG

SAMSUNG ELECTRONICS CO LTD

Semiconductor device having sufficient process margin and method of forming same

Integrated circuit semiconductor device with overlay key and alignment key and method of fabricating the same

Resist composition comprising photosensitive polymer having loctone in its backbone

Photosensitive polymer and chemically amplified photoresist composition containing the same

Method for manufacturing a photoresist pattern defining a small opening and method for manufacturing semiconductor device using the same

Photosensitive polymer

Semiconductor device having sufficient process margin and method of forming same

Method of forming trench in semiconductor device

Photosensitive polymer having phenyl ring and lactone group and resist composition comprising the same

Photosensitive polymer and resist composition containing the same

Photosensitive polymer and chemically amplified photoresist composition containing the same

Photosensitive polymer having cyclic backbone and resist composition comprising the same

Resist composition comprising photosensitive polymer having lactone in its backbone

Resist composition comprising photosensitive polymer having lactone in its backbone

Photosensitive polymer and chemically amplified photoresist composition containing the same

Photosensitive polymer and chemically amplified photoresist composition containing the same

Optical element holder and projection exposure apparatus having the same

BAE YONG-KUG

Semiconductor device and method of fabricating the semiconductor device

RYOO MAN-HYOUNG

Semiconductor device having sufficient process margin and method of forming same

KANG CHANG-JIN

Integrated circuit semiconductor device with overlay key and alignment key and method of fabricating the same