Inventor
TOMA DOREL I
US15 patents
⚠️ This page may combine multiple inventors who share the name “TOMA DOREL I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS9443725B2Sep 13, 2016
Multi-step system and method for curing a dielectric film
TOKYO ELECTRON LTD465 citations98
US7977256B2Jul 12, 2011
Method for removing a pore-generating material from an uncured low-k dielectric film
TOKYO ELECTRON LTD504 citations98
US7858533B2Dec 28, 2010
Method for curing a porous low dielectric constant dielectric film
TOKYO ELECTRON LTD522 citations98
US7666754B2Feb 23, 2010
Method and system for forming an air gap structure
TOKYO ELECTRON LTD21 citations92
US7405168B2Jul 29, 2008
Plural treatment step process for treating dielectric films
TOKYO ELECTRON LTD26 citations92
US7901743B2Mar 8, 2011
Plasma-assisted vapor phase treatment of low dielectric constant films using a batch processing system
TOKYO ELECTRON LTD15 citations84
US7855123B2Dec 21, 2010
Method of integrating an air gap structure with a substrate
TOKYO ELECTRON LTD13 citations84
US10068765B2Sep 4, 2018
Multi-step system and method for curing a dielectric film
TOKYO ELECTRON LTD2 citations73
US8039049B2Oct 18, 2011
Treatment of low dielectric constant films using a batch processing system
TOKYO ELECTRON LTD5 citations62
US7829268B2Nov 9, 2010
Method for air gap formation using UV-decomposable materials
TOKYO ELECTRON LTD2 citations62