Inventor
FAVRE ARNAUD
FR9 patents
⚠️ This page may combine multiple inventors who share the name “FAVRE ARNAUD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FAVRE ARNAUD
2 patentsALCATEL LUCENT
2 patentsADIXEN VACUUM PRODUCTS
2 patentsUS9810617B2Nov 7, 2017
Station and method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure
ADIXEN VACUUM PRODUCTS1 citations45
US9599110B2Mar 21, 2017
Gas pumping and treatment device
ADIXEN VACUUM PRODUCTS0 citations33