Inventor
TAPPAN JAMES E
US15 patents
⚠️ This page may combine multiple inventors who share the name “TAPPAN JAMES E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
10 patentsUS5200232AApr 6, 1993
Reaction chamber design and method to minimize particle generation in chemical vapor deposition reactors
LAM RES CORP132 citations97
US5368646ANov 29, 1994
Reaction chamber design to minimize particle generation in chemical vapor deposition reactors
LAM RES CORP23 citations91
US8735765B2May 27, 2014
Adjustable gap capacitively coupled RF plasma reactor including lateral bellows and non-contact particle seal
LAM RES CORP7 citations80
US10665435B2May 26, 2020
Chamber with vertical support stem for symmetric conductance and RF delivery
LAM RES CORP1 citations72
US10395902B2Aug 27, 2019
Chamber with vertical support stem for symmetric conductance and RF delivery
LAM RES CORP1 citations72
US10049862B2Aug 14, 2018
Chamber with vertical support stem for symmetric conductance and RF delivery
LAM RES CORP4 citations72
US10037869B2Jul 31, 2018
Plasma processing devices having multi-port valve assemblies
LAM RES CORP2 citations71
US12100575B2Sep 24, 2024
Plasma processing devices having multi-port valve assemblies
LAM RES CORP0 citations60
US12406872B2Sep 2, 2025
Semiconductor processing chamber with dual-lift mechanism for edge ring elevation management
LAM RES CORP0 citations51
US9103416B2Aug 11, 2015
Floating collar clamping device for auto-aligning nut and screw in linear motion leadscrew and nut assembly and methods thereof
LAM RES CORP1 citations51
TAPPAN JAMES E
4 patentsUS8552334B2Oct 8, 2013
Adjustable gap capacitively coupled RF plasma reactor including lateral bellows and non-contact particle seal
TAPPAN JAMES E68 citations93
US8257548B2Sep 4, 2012
Electrode orientation and parallelism adjustment mechanism for plasma processing systems
TAPPAN JAMES E6 citations82
US8394233B2Mar 12, 2013
Electrode orientation and parallelism adjustment mechanism for plasma processing systems
TAPPAN JAMES E2 citations61
US8438712B2May 14, 2013
Floating collar clamping device for auto-aligning nut and screw in linear motion leadscrew and nut assembly
TAPPAN JAMES E1 citations50