Inventor
KIMURA TAKAFUMI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “KIMURA TAKAFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
5 patentsUS5183510AFeb 2, 1993
Apparatus and process for chemical vapor deposition
FUJITSU LTD67 citations95
US5037774AAug 6, 1991
Process for the production of semiconductor devices utilizing multi-step deposition and recrystallization of amorphous silicon
FUJITSU LTD55 citations95
US6025222AFeb 15, 2000
Vapor phase growth of a dielectric film and a fabrication process of a semiconductor device having such a dielectric film
FUJITSU LTD51 citations92
US4931425AJun 5, 1990
Process for chemical vapor deposition of superconductive oxide
FUJITSU LTD40 citations91
US5107119AApr 21, 1992
Method of evaluating characteristics of superconductors and process and apparatus for forming superconductor film by using the method
FUJITSU LTD6 citations59
TOKYO ELECTRON LTD
3 patentsUS9111747B2Aug 18, 2015
Film deposition apparatus, substrate processing apparatus and film deposition method
TOKYO ELECTRON LTD15 citations84
US9583312B2Feb 28, 2017
Film formation device, substrate processing device, and film formation method
TOKYO ELECTRON LTD5 citations73
US9167680B2Oct 20, 2015
Plasma processing apparatus, plasma generating apparatus, antenna structure and plasma generating method
TOKYO ELECTRON LTD5 citations73