Inventor
SHORTT DAVID W
US26 patents
⚠️ This page may combine multiple inventors who share the name “SHORTT DAVID W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
14 patentsUS9891177B2Feb 13, 2018
TDI sensor in a darkfield system
KLA TENCOR CORP56 citations96
US9092846B2Jul 28, 2015
Detecting defects on a wafer using defect-specific and multi-channel information
KLA TENCOR CORP30 citations94
US7009696B2Mar 7, 2006
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool
KLA TENCOR CORP19 citations92
US9846930B2Dec 19, 2017
Detecting defects on a wafer using defect-specific and multi-channel information
KLA TENCOR CORP5 citations84
US9558858B2Jan 31, 2017
System and method for imaging a sample with a laser sustained plasma illumination output
KLA TENCOR CORP9 citations84
US9390902B2Jul 12, 2016
Method and system for controlling convective flow in a light-sustained plasma
KLA TENCOR CORP13 citations84
US9552636B2Jan 24, 2017
Detecting defects on a wafer using defect-specific and multi-channel information
KLA TENCOR CORP3 citations73
US9297769B1Mar 29, 2016
Method for reducing aliasing in TDI based imaging
KLA TENCOR CORP3 citations73
US6686996B2Feb 3, 2004
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool
KLA TENCOR CORP7 citations73
US10317347B2Jun 11, 2019
Determining information for defects on wafers
KLA TENCOR CORP2 citations70
US7436506B2Oct 14, 2008
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool
KLA TENCOR CORP1 citations62
US7796805B1Sep 14, 2010
Defect detection
KLA TENCOR CORP2 citations59
US9887076B2Feb 6, 2018
Method and system for controlling convective flow in a light-sustained plasma
KLA TENCOR CORP0 citations52
US10571407B2Feb 25, 2020
Determining information for defects on wafers
KLA TENCOR CORP0 citations49
KLA TENCOR TECH CORP
8 patentsUS6781688B2Aug 24, 2004
Process for identifying defects in a substrate having non-uniform surface properties
KLA TENCOR TECH CORP90 citations98
US6414752B1Jul 2, 2002
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool
KLA TENCOR TECH CORP34 citations95
US7271921B2Sep 18, 2007
Method and apparatus for determining surface layer thickness using continuous multi-wavelength surface scanning
KLA TENCOR TECH CORP24 citations92
US7199874B2Apr 3, 2007
Darkfield inspection system having a programmable light selection array
KLA TENCOR TECH CORP26 citations92
US7061598B1Jun 13, 2006
Darkfield inspection system having photodetector array
KLA TENCOR TECH CORP24 citations92
US7002677B2Feb 21, 2006
Darkfield inspection system having a programmable light selection array
KLA TENCOR TECH CORP31 citations92
US7106432B1Sep 12, 2006
Surface inspection system and method for using photo detector array to detect defects in inspection surface
KLA TENCOR TECH CORP35 citations91
US7505619B2Mar 17, 2009
System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surface
KLA TENCOR TECH CORP2 citations61