Inventor
RAJARAM REKHA
US11 patents
⚠️ This page may combine multiple inventors who share the name “RAJARAM REKHA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS9330938B2May 3, 2016
Method of patterning dopant films in high-k dielectrics in a soft mask integration scheme
IBM12 citations92
US9824930B2Nov 21, 2017
Method of patterning dopant films in high-k dielectrics in a soft mask integration scheme
IBM3 citations73
US9721842B2Aug 1, 2017
Method of patterning dopant films in high-k dielectrics in a soft mask integration scheme
IBM1 citations63
US9472419B2Oct 18, 2016
Method of patterning dopant films in high-K dielectrics in a soft mask integration scheme
IBM0 citations52
GLOBALFOUNDRIES INC
3 patentsUS9343372B1May 17, 2016
Metal stack for reduced gate resistance
GLOBALFOUNDRIES INC23 citations92
US10170373B2Jan 1, 2019
Methods for making robust replacement metal gates and multi-threshold devices in a soft mask integration scheme
GLOBALFOUNDRIES INC1 citations62
US9418995B2Aug 16, 2016
Method and structure for transistors using gate stack dopants with minimal nitrogen penetration
GLOBALFOUNDRIES INC0 citations41