Inventor
Senn Brandon
US6 patents
Patents
6 patentsUS9966290B2May 8, 2018
System and method for wafer alignment and centering with CCD camera and robot
LAM RES CORP10 citations80
US9779977B2Oct 3, 2017
End effector assembly for clean/dirty substrate handling
LAM RES CORP5 citations80
US9831110B2Nov 28, 2017
Vision-based wafer notch position measurement
LAM RES CORP13 citations78
US9698036B2Jul 4, 2017
Stacked wafer cassette loading system
LAM RES CORP7 citations77
US9536764B2Jan 3, 2017
End effector for wafer transfer system and method of transferring wafers
LAM RES CORP3 citations67
US10707113B2Jul 7, 2020
End effector assembly for clean/dirty substrate handling
LAM RES CORP0 citations48