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Inventor

KUMMEL ANDREW C

US28 patents
⚠️ This page may combine multiple inventors who share the name “KUMMEL ANDREW C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

13 patents
US11542597B2Jan 3, 2023

Selective deposition of metal oxide by pulsed chemical vapor deposition

APPLIED MATERIALS INC2 citations70
US9607920B2Mar 28, 2017

Self-limiting chemical vapor deposition and atomic layer deposition methods

APPLIED MATERIALS INC2 citations69
US9305780B2Apr 5, 2016

Self-limiting chemical vapor deposition and atomic layer deposition methods

APPLIED MATERIALS INC4 citations69
US11993845B2May 28, 2024

High selectivity atomic layer deposition process

APPLIED MATERIALS INC1 citations59
US11993842B2May 28, 2024

Selective deposition of metal oxide by pulsed chemical vapor deposition

APPLIED MATERIALS INC0 citations59
US11118263B2Sep 14, 2021

Method for forming a protective coating film for halide plasma resistance

APPLIED MATERIALS INC0 citations53
US10553425B2Feb 4, 2020

Self-limiting and saturating chemical vapor deposition of a silicon bilayer and ALD

APPLIED MATERIALS INC0 citations51
US10373824B2Aug 6, 2019

CVD silicon monolayer formation method and gate oxide ALD formation on semiconductor materials

APPLIED MATERIALS INC0 citations51
US10297441B2May 21, 2019

Low-temperature atomic layer deposition of boron nitride and BN structures

APPLIED MATERIALS INC0 citations51
US9824889B2Nov 21, 2017

CVD silicon monolayer formation method and gate oxide ALD formation on III-V materials

APPLIED MATERIALS INC1 citations51
US9773663B2Sep 26, 2017

Self-limiting and saturating chemical vapor deposition of a silicon bilayer and ALD

APPLIED MATERIALS INC0 citations51
US11664215B2May 30, 2023

High selectivity atomic later deposition process

APPLIED MATERIALS INC0 citations48
US12305279B2May 20, 2025

Ultra high-k hafnium oxide and hafnium zirconium oxide films

APPLIED MATERIALS INC0 citations45

UNIV CALIFORNIA

11 patents

KIPPS THOMAS J

1 patent

TROGLER WILLIAM C

1 patent

KUMMEL ANDREW C

1 patent

SAMSUNG ELECTRONICS CO LTD

1 patent