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Inventor
TODAKA RYOJI
CN
3 patents
⚠️ This page may combine multiple inventors who share the name “TODAKA RYOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO FAB EQUIP INC
1 patent
US7516833B2
Apr 14, 2009
Multi-station workpiece processors, methods of processing semiconductor workpieces within multi-station workpiece processors, and methods of moving semiconductor workpieces within multi-station workpiece processors
ADVANCED MICRO FAB EQUIP INC
23 citations
86
CHEN AIHUA
1 patent
US9947562B2
Apr 17, 2018
Method and apparatus for processing semiconductor work pieces
CHEN AIHUA
2 citations
70
APPLIED MATERIALS INC
1 patent
US6093456A
Jul 25, 2000
Beam stop apparatus for an ion implanter
APPLIED MATERIALS INC
12 citations
68