Inventor
OONISHI TSUYOSHI
JP3 patents
Patents
3 patentsUS10056227B2Aug 21, 2018
Focused ion beam apparatus
HITACHI HIGH TECH SCIENCE CORP1 citations46
US9934940B2Apr 3, 2018
Control device, charged particle beam apparatus, program and method for producing processed product
HITACHI HIGH TECH SCIENCE CORP0 citations39
US9947506B2Apr 17, 2018
Sample holder and focused ion beam apparatus
HITACHI HIGH TECH SCIENCE CORP0 citations36