Inventor
VAN LIESHOUT RICHARD HENRICUS ADRIANUS
NL7 patents
Patents
7 patentsUS9726985B2Aug 8, 2017
Stage system and a lithographic apparatus
ASML NETHERLANDS BV4 citations71
US9983482B2May 29, 2018
Radiation collector, radiation source and lithographic apparatus
ASML NETHERLANDS BV2 citations70
US9785060B2Oct 10, 2017
Stage system and lithographic apparatus comprising such stage system
ASML NETHERLANDS BV0 citations49
US9360774B2Jun 7, 2016
Lithographic apparatus with a deformation sensor
ASML NETHERLANDS BV1 citations48
US9383659B2Jul 5, 2016
Positioning system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations46
US9897926B2Feb 20, 2018
Stage positioning system and lithographic apparatus
ASML NETHERLANDS BV0 citations43
US10061213B2Aug 28, 2018
Sensor, object positioning system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations36