Inventor
ARAMAKI TOORU
JP13 patents
⚠️ This page may combine multiple inventors who share the name “ARAMAKI TOORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
10 patentsUS10217611B2Feb 26, 2019
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP4 citations73
US10804080B2Oct 13, 2020
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP3 citations72
US10037909B2Jul 31, 2018
Plasma processing apparatus
HITACHI HIGH TECH CORP3 citations72
US11842885B2Dec 12, 2023
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations62
US11682542B2Jun 20, 2023
Plasma processing device
HITACHI HIGH TECH CORP0 citations62
US10930476B2Feb 23, 2021
Plasma processing device
HITACHI HIGH TECH CORP1 citations62
US7303998B2Dec 4, 2007
Plasma processing method
HITACHI HIGH TECH CORP2 citations62
US10811231B2Oct 20, 2020
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations52
US11152192B2Oct 19, 2021
Plasma processing apparatus and method
HITACHI HIGH TECH CORP0 citations51
US7947189B2May 24, 2011
Vacuum processing apparatus and vacuum processing method of sample
HITACHI HIGH TECH CORP0 citations41