Inventor
SPYROPOULOS EVANGELOS T
US5 patents
Patents
5 patentsUS12241772B2Mar 4, 2025
Flow metrology calibration for improved processing chamber matching in substrate processing systems
LAM RES CORP0 citations59
US11959793B2Apr 16, 2024
Flow metrology calibration for improved processing chamber matching in substrate processing systems
LAM RES CORP0 citations59
US10760944B2Sep 1, 2020
Hybrid flow metrology for improved chamber matching
LAM RES CORP0 citations45
US9364870B2Jun 14, 2016
Ultrasonic cleaning method and apparatus therefore
LAM RES CORP1 citations44
US9174249B2Nov 3, 2015
Ultrasonic cleaning method and apparatus therefore
LAM RES CORP0 citations44