Inventor
KE CHANG
US15 patents
⚠️ This page may combine multiple inventors who share the name “KE CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUS12313180B2May 27, 2025
Gas flow valve and methods of operating thereof
APPLIED MATERIALS INC2 citations72
US10643840B2May 5, 2020
Selective deposition defects removal by chemical etch
APPLIED MATERIALS INC2 citations70
US11815436B2Nov 14, 2023
Detection of surface particles on chamber components with carbon dioxide
APPLIED MATERIALS INC2 citations69
US11441974B2Sep 13, 2022
Detection of surface particles on chamber components with carbon dioxide
APPLIED MATERIALS INC2 citations69
US12024770B2Jul 2, 2024
Methods for selective deposition using self-assembled monolayers
APPLIED MATERIALS INC1 citations62
US11735420B2Aug 22, 2023
Wafer treatment for achieving defect-free self-assembled monolayers
APPLIED MATERIALS INC0 citations62
US11515155B2Nov 29, 2022
Methods for enhancing selectivity in SAM-based selective deposition
APPLIED MATERIALS INC0 citations62
US11194244B2Dec 7, 2021
Extreme ultraviolet mask absorber and processes for manufacture
APPLIED MATERIALS INC0 citations62
US11033930B2Jun 15, 2021
Methods and apparatus for cryogenic gas stream assisted SAM-based selective deposition
APPLIED MATERIALS INC0 citations62
US10950433B2Mar 16, 2021
Methods for enhancing selectivity in SAM-based selective deposition
APPLIED MATERIALS INC1 citations62
US10892161B2Jan 12, 2021
Enhanced selective deposition process
APPLIED MATERIALS INC0 citations62
US10770292B2Sep 8, 2020
Wafer treatment for achieving defect-free self-assembled monolayers
APPLIED MATERIALS INC1 citations62
US12169163B2Dec 17, 2024
Detection of surface particles on chamber components with carbon dioxide
APPLIED MATERIALS INC0 citations59
US11508610B2Nov 22, 2022
Substrate support with edge seal
APPLIED MATERIALS INC0 citations47