P

Inventor

SHEN HONGLIANG

US23 patents
⚠️ This page may combine multiple inventors who share the name “SHEN HONGLIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GLOBALFOUNDRIES INC

20 patents
US9653583B1May 16, 2017

Methods of forming diffusion breaks on integrated circuit products comprised of finFET devices

GLOBALFOUNDRIES INC79 citations98
US9368496B1Jun 14, 2016

Method for uniform recess depth and fill in single diffusion break for fin-type process and resulting devices

GLOBALFOUNDRIES INC77 citations98
US9171752B1Oct 27, 2015

Product comprised of FinFET devices with single diffusion break isolation structures, and methods of making such a product

GLOBALFOUNDRIES INC83 citations97
US9455198B1Sep 27, 2016

Methods of removing fins so as to form isolation structures on products that include FinFET semiconductor devices

GLOBALFOUNDRIES INC51 citations94
US9406676B2Aug 2, 2016

Method for forming single diffusion breaks between finFET devices and the resulting devices

GLOBALFOUNDRIES INC41 citations94
US9263516B1Feb 16, 2016

Product comprised of FinFET devices with single diffusion break isolation structures

GLOBALFOUNDRIES INC22 citations92
US9087870B2Jul 21, 2015

Integrated circuits including FINFET devices with shallow trench isolation that includes a thermal oxide layer and methods for making the same

GLOBALFOUNDRIES INC18 citations92
US9123773B1Sep 1, 2015

T-shaped single diffusion barrier with single mask approach process flow

GLOBALFOUNDRIES INC34 citations91
US9373535B2Jun 21, 2016

T-shaped fin isolation region and methods of fabrication

GLOBALFOUNDRIES INC7 citations84
US10423078B1Sep 24, 2019

FinFET cut isolation opening revision to compensate for overlay inaccuracy

GLOBALFOUNDRIES INC6 citations82
US9123771B2Sep 1, 2015

Shallow trench isolation integration methods and devices formed thereby

GLOBALFOUNDRIES INC13 citations82
US10580857B2Mar 3, 2020

Method to form high performance fin profile for 12LP and above

GLOBALFOUNDRIES INC3 citations72
US9219002B2Dec 22, 2015

Overlay performance for a fin field effect transistor device

GLOBALFOUNDRIES INC6 citations72
US10324381B1Jun 18, 2019

FinFET cut isolation opening revision to compensate for overlay inaccuracy

GLOBALFOUNDRIES INC2 citations71
US9385192B2Jul 5, 2016

Shallow trench isolation integration methods and devices formed thereby

GLOBALFOUNDRIES INC3 citations71
US9362176B2Jun 7, 2016

Uniform exposed raised structures for non-planar semiconductor devices

GLOBALFOUNDRIES INC2 citations63
US8969205B2Mar 3, 2015

Double patterning via triangular shaped sidewall spacers

GLOBALFOUNDRIES INC2 citations62
US9159667B2Oct 13, 2015

Methods of forming an e-fuse for an integrated circuit product and the resulting e-fuse structure

GLOBALFOUNDRIES INC2 citations57
US10910276B1Feb 2, 2021

STI structure with liner along lower portion of longitudinal sides of active region, and related FET and method

GLOBALFOUNDRIES INC0 citations51
US10804170B2Oct 13, 2020

Device/health of line (HOL) aware eBeam based overlay (EBO OVL) structure

GLOBALFOUNDRIES INC0 citations51

GLOBALFOUNDRIES US INC

2 patents

GLOBALFOUNDARIES INC

1 patent