Inventor
HIGUCHI AYUMI
JP25 patents
⚠️ This page may combine multiple inventors who share the name “HIGUCHI AYUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
18 patentsUS11413662B2Aug 16, 2022
Substrate cleaning apparatus and substrate cleaning method
SCREEN HOLDINGS CO LTD2 citations72
US10312114B2Jun 4, 2019
Substrate processing method, and substrate processing device
SCREEN HOLDINGS CO LTD3 citations70
US9984903B2May 29, 2018
Treatment cup cleaning method, substrate treatment method, and substrate treatment apparatus
SCREEN HOLDINGS CO LTD4 citations68
US9768042B2Sep 19, 2017
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD2 citations68
US10651029B2May 12, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD2 citations67
US11881403B2Jan 23, 2024
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations61
US11145516B2Oct 12, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations61
US10622204B2Apr 14, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD1 citations61
US11919051B2Mar 5, 2024
Substrate cleaning apparatus and substrate cleaning method
SCREEN HOLDINGS CO LTD0 citations51
US11217461B2Jan 4, 2022
Substrate processing device
SCREEN HOLDINGS CO LTD0 citations51
US10710913B2Jul 14, 2020
Waste liquid treatment method and waste liquid treatment apparatus
SCREEN HOLDINGS CO LTD0 citations51
US11410853B2Aug 9, 2022
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD0 citations50
US11018017B2May 25, 2021
Substrate treatment method
SCREEN HOLDINGS CO LTD0 citations50
US11260436B2Mar 1, 2022
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations49
US11094564B2Aug 17, 2021
Processing liquid supplying apparatus, substrate processing apparatus and processing liquid supplying method
SCREEN HOLDINGS CO LTD0 citations41
US10717117B2Jul 21, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations39
US10816141B2Oct 27, 2020
Chemical solution feeder, substrate treatment apparatus, method for feeding chemical solution, and method for treating substrate
SCREEN HOLDINGS CO LTD0 citations37
US10840083B2Nov 17, 2020
Substrate cleaning method, method for creating substrate cleaning recipe, and device for creating substrate cleaning recipe
SCREEN HOLDINGS CO LTD0 citations34
DAINIPPON SCREEN MFG
5 patentsUS7981286B2Jul 19, 2011
Substrate processing apparatus and method of removing particles
DAINIPPON SCREEN MFG7 citations83
US9548197B2Jan 17, 2017
Substrate treatment method and substrate treatment apparatus
DAINIPPON SCREEN MFG3 citations70
US7392814B2Jul 1, 2008
Substrate processing apparatus and method
DAINIPPON SCREEN MFG5 citations63
US7841788B2Nov 30, 2010
Substrate processing apparatus and substrate processing method
DAINIPPON SCREEN MFG1 citations51
US9508568B2Nov 29, 2016
Substrate processing apparatus and substrate processing method for performing cleaning treatment on substrate
DAINIPPON SCREEN MFG0 citations39