Inventor
AKANISHI YUYA
JP12 patents
⚠️ This page may combine multiple inventors who share the name “AKANISHI YUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
6 patentsUS10892177B2Jan 12, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD2 citations71
US11881403B2Jan 23, 2024
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations61
US11145516B2Oct 12, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations61
US12557581B2Feb 17, 2026
Etching method and etching apparatus
SCREEN HOLDINGS CO LTD0 citations56
US11410853B2Aug 9, 2022
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD0 citations50
US12444612B2Oct 14, 2025
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations45
DAINIPPON SCREEN MFG
4 patentsUS9899240B2Feb 20, 2018
Substrate treatment apparatus
DAINIPPON SCREEN MFG5 citations72
US8883026B2Nov 11, 2014
Substrate processing method and substrate processing apparatus
DAINIPPON SCREEN MFG5 citations72
US8877653B2Nov 4, 2014
Substrate processing method and substrate processing apparatus
DAINIPPON SCREEN MFG1 citations51
US8821741B2Sep 2, 2014
Substrate processing method and substrate processing apparatus
DAINIPPON SCREEN MFG0 citations51