Inventor
VAN DER WILT PAUL
DE7 patents
⚠️ This page may combine multiple inventors who share the name “VAN DER WILT PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
COHERENT LASERSYSTEMS GMBH & CO KG
6 patentsUS9335276B2May 10, 2016
Monitoring method and apparatus for control of excimer laser annealing
COHERENT LASERSYSTEMS GMBH & CO KG8 citations79
US10247952B2Apr 2, 2019
Polarization-controlled laser line-projector
COHERENT LASERSYSTEMS GMBH & CO KG1 citations58
US11183808B2Nov 23, 2021
Excimer laser with uniform beam
COHERENT LASERSYSTEMS GMBH & CO KG1 citations56
US10121687B2Nov 6, 2018
Monitoring method and apparatus for control of excimer laser annealing
COHERENT LASERSYSTEMS GMBH & CO KG0 citations48
US9976969B1May 22, 2018
Monitoring method and apparatus for excimer-laser annealing process
COHERENT LASERSYSTEMS GMBH & CO KG0 citations48
US12148615B2Nov 19, 2024
Method and apparatus for laser annealing
COHERENT LASERSYSTEMS GMBH & CO KG0 citations47