Inventor
BUDIARTO EDWARD W
US15 patents
⚠️ This page may combine multiple inventors who share the name “BUDIARTO EDWARD W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUS7190458B2Mar 13, 2007
Use of scanning beam for differential evaluation of adjacent regions for change in reflectivity
APPLIED MATERIALS INC11 citations83
US9870935B2Jan 16, 2018
Monitoring system for deposition and method of operation thereof
APPLIED MATERIALS INC4 citations73
US7136163B2Nov 14, 2006
Differential evaluation of adjacent regions for change in reflectivity
APPLIED MATERIALS INC7 citations73
US10260855B2Apr 16, 2019
Electroplating tool with feedback of metal thickness distribution and correction
APPLIED MATERIALS INC2 citations70
US11898249B2Feb 13, 2024
PECVD process
APPLIED MATERIALS INC0 citations62
US9335151B2May 10, 2016
Film measurement
APPLIED MATERIALS INC2 citations62
US12492890B2Dec 9, 2025
In-situ reflectometry for real-time process control
APPLIED MATERIALS INC0 citations61
US8018586B2Sep 13, 2011
Metrology of thin film devices using an addressable micromirror array
APPLIED MATERIALS INC5 citations60
US7911603B2Mar 22, 2011
Spectrometric metrology of workpieces using a permanent window as a spectral reference
APPLIED MATERIALS INC2 citations60
US10522375B2Dec 31, 2019
Monitoring system for deposition and method of operation thereof
APPLIED MATERIALS INC0 citations52
US11226234B2Jan 18, 2022
Spectrum shaping devices and techniques for optical characterization applications
APPLIED MATERIALS INC0 citations51
US10234261B2Mar 19, 2019
Fast and continuous eddy-current metrology of a conductive film
APPLIED MATERIALS INC0 citations51
US11609183B2Mar 21, 2023
Methods and systems to measure properties of products on a moving blade in electronic device manufacturing machines
APPLIED MATERIALS INC0 citations50
US8027031B2Sep 27, 2011
Spectrometric metrology of workpieces using a permanent window as a spectral reference
APPLIED MATERIALS INC0 citations50