Inventor
SCHENKER RICHARD
US17 patents
Patents
17 patentsUS6701004B1Mar 2, 2004
Detecting defects on photomasks
INTEL CORP67 citations93
US6883159B2Apr 19, 2005
Patterning semiconductor layers using phase shifting and assist features
INTEL CORP18 citations91
US7084960B2Aug 1, 2006
Lithography using controlled polarization
INTEL CORP18 citations80
US11764263B2Sep 19, 2023
Gate-all-around integrated circuit structures having depopulated channel structures using multiple bottom-up oxidation approaches
INTEL CORP2 citations73
US11462469B2Oct 4, 2022
Single mask lithography line end enhancement
INTEL CORP2 citations71
US11569231B2Jan 31, 2023
Non-planar transistors with channel regions having varying widths
INTEL CORP3 citations69
US12506059B2Dec 23, 2025
Vertically spaced intra-level interconnect line metallization for integrated circuit devices
INTEL CORP0 citations61
US11948874B2Apr 2, 2024
Vertically spaced intra-level interconnect line metallization for integrated circuit devices
INTEL CORP0 citations61
US11837542B2Dec 5, 2023
Interconnects having a portion without a liner material and related structures, devices, and methods
INTEL CORP0 citations61
US11264325B2Mar 1, 2022
Interconnects having a portion without a liner material and related structures, devices, and methods
INTEL CORP0 citations61
US7158275B2Jan 2, 2007
Polarization modulator
INTEL CORP2 citations61
US11424160B2Aug 23, 2022
Self-aligned local interconnects
INTEL CORP0 citations60
US7816061B2Oct 19, 2010
Lithography masks for improved line-end patterning
INTEL CORP5 citations60
US11300885B2Apr 12, 2022
EUV phase-shift SRAF masks by means of embedded phase shift layers
INTEL CORP0 citations58
US8035802B2Oct 11, 2011
Method and apparatus for lithographic imaging using asymmetric illumination
INTEL CORP0 citations51
US7531295B2May 12, 2009
Method and apparatus for lithographic imaging using asymmetric illumination
INTEL CORP0 citations51
US6503672B2Jan 7, 2003
Electron beam projection utilizing multiple exposures with different current densities
INTEL CORP1 citations51