Inventor
Chen zi-wen
TW5 patents
Patents
5 patentsUS10534279B1Jan 14, 2020
Methods and apparatus for removing contamination from lithographic tool
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11657492B2May 23, 2023
Reticle backside inspection method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10997706B2May 4, 2021
Reticle backside inspection method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10852649B2Dec 1, 2020
Methods and apparatus for removing contamination from lithographic tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10509334B2Dec 17, 2019
Methods and apparatus for removing contamination from lithographic tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51