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Inventor
ATWOOD DANA L
US
3 patents
⚠️ This page may combine multiple inventors who share the name “ATWOOD DANA L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
2 patents
US10903107B2
Jan 26, 2021
Semiconductor process transport apparatus comprising an adapter pendant
BROOKS AUTOMATION INC
1 citations
67
US11670534B2
Jun 6, 2023
Transport apparatus and adapter pendant
BROOKS AUTOMATION INC
0 citations
57
BROOKS AUTOMATION US LLC
1 patent
US12575375B2
Mar 10, 2026
Transport apparatus and adapter pendant
BROOKS AUTOMATION US LLC
0 citations
56