Inventor
MOURA JAIRO
US12 patents
⚠️ This page may combine multiple inventors who share the name “MOURA JAIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
7 patentsUS7904182B2Mar 8, 2011
Scalable motion control system
BROOKS AUTOMATION INC41 citations94
US7834618B2Nov 16, 2010
Position sensor system
BROOKS AUTOMATION INC39 citations90
US11776834B2Oct 3, 2023
On the fly automatic wafer centering method and apparatus
BROOKS AUTOMATION INC1 citations71
US10488851B2Nov 26, 2019
Scalable motion control system
BROOKS AUTOMATION INC2 citations71
US10903107B2Jan 26, 2021
Semiconductor process transport apparatus comprising an adapter pendant
BROOKS AUTOMATION INC1 citations67
US11195738B2Dec 7, 2021
Substrate processing apparatus
BROOKS AUTOMATION INC0 citations62
US11670534B2Jun 6, 2023
Transport apparatus and adapter pendant
BROOKS AUTOMATION INC0 citations57