Inventor
NIKIFOROV GRIGORY
US19 patents
⚠️ This page may combine multiple inventors who share the name “NIKIFOROV GRIGORY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIR LIQUIDE
17 patentsUS10584039B2Mar 10, 2020
Titanium-containing film forming compositions for vapor deposition of titanium-containing films
AIR LIQUIDE2 citations73
US11124876B2Sep 21, 2021
Si-containing film forming precursors and methods of using the same
AIR LIQUIDE3 citations72
US10287175B1May 14, 2019
Method for purification and storage of Til4 for Ti-containing film deposition
AIR LIQUIDE2 citations71
US12304922B1May 20, 2025
Low pressure process for synthesis of Pt(PF3)4 involving a soluble intermediate and storage of obtained Pt(PF3)4
AIR LIQUIDE0 citations62
US11673904B1Jun 13, 2023
Low pressure process for synthesis of Pt(PF3)4 involving a soluble intermediate and storage of obtained Pt(PF3)4
AIR LIQUIDE1 citations62
US11401166B2Aug 2, 2022
Process for producing isomer enriched higher silanes
AIR LIQUIDE0 citations62
US11230474B2Jan 25, 2022
Process for producing isomer enriched higher silanes
AIR LIQUIDE0 citations62
US11168099B2Nov 9, 2021
Titanium-containing film forming compositions for vapor deposition of titanium-containing films
AIR LIQUIDE0 citations62
US10689405B2Jun 23, 2020
Titanium-containing film forming compositions for vapor deposition of titanium-containing films
AIR LIQUIDE1 citations62
US12091374B2Sep 17, 2024
Mono-substituted cyclopentadienes and metal cyclopentadienyl complexes and synthesis methods thereof
AIR LIQUIDE0 citations61
US11820654B2Nov 21, 2023
Si-containing film forming precursors and methods of using the same
AIR LIQUIDE0 citations61
US11739220B2Aug 29, 2023
Perhydropolysilazane compositions and methods for forming oxide films using same
AIR LIQUIDE1 citations61
US11377359B2Jul 5, 2022
Process for producing liquid polysilanes and isomer enriched higher silanes
AIR LIQUIDE1 citations61
US11274069B2Mar 15, 2022
Mono-substituted cyclopentadienes and metal cyclopentadienyl complexes and synthesis methods thereof
AIR LIQUIDE0 citations61
US11097953B2Aug 24, 2021
Process for producing liquid polysilanes and isomer enriched higher silanes
AIR LIQUIDE0 citations61
US12497691B2Dec 16, 2025
Devices having a rare earth (oxy) fluoride coating for improved resistance to corrosive chemical environments and methods for making and using these devices
AIR LIQUIDE0 citations60
US10669160B2Jun 2, 2020
Heterogeneous wet synthesis process for preparation of high purity tungsten pentahalide
AIR LIQUIDE0 citations49
L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
2 patentsUS10752507B2Aug 25, 2020
Process for producing liquid polysilanes and isomer enriched higher silanes
L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude0 citations51
US9738971B2Aug 22, 2017
Vapor deposition methods to form group 8-containing films
L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude1 citations50