Inventor
GOH JUNG SUK
KR8 patents
Patents
8 patentsUS11495467B2Nov 8, 2022
Method and apparatus for etching thin layer
SEMES CO LTD1 citations59
US12300519B2May 13, 2025
Surface treatment method
SEMES CO LTD0 citations58
US11764084B2Sep 19, 2023
Surface treatment apparatus and surface treatment method
SEMES CO LTD0 citations58
US12427446B2Sep 30, 2025
Liquid supplying unit and liquid supplying method
SEMES CO LTD0 citations57
US12585190B2Mar 24, 2026
Liquid chemical supply apparatus and liquid chemical supply system
SEMES CO LTD0 citations54
US12148674B2Nov 19, 2024
Substrate processing control using a measured size distribution of by-product particles
SEMES CO LTD0 citations49
US11715651B2Aug 1, 2023
Apparatus for and method of treating substrate
SEMES CO LTD0 citations47
US12320735B2Jun 3, 2025
Bubble measurement unit, substrate treating apparatus including the same, and bubble measurement method
SEMES CO LTD0 citations40