Inventor
KIM KUK SAENG
KR9 patents
Patents
9 patentsUS11495467B2Nov 8, 2022
Method and apparatus for etching thin layer
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US12512306B2Dec 30, 2025
Lift pin assembly and substrate treating apparatus
SEMES CO LTD0 citations58
US12300519B2May 13, 2025
Surface treatment method
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US12027389B2Jul 2, 2024
Substrate treatment apparatus containing elastic support members attached to chemical recovery unit
SEMES CO LTD0 citations58
US11764084B2Sep 19, 2023
Surface treatment apparatus and surface treatment method
SEMES CO LTD0 citations58
US12427446B2Sep 30, 2025
Liquid supplying unit and liquid supplying method
SEMES CO LTD0 citations57
US12322614B2Jun 3, 2025
Wafer expander for uniformly expanding gap between dies, and die supplying module and die bonding equipment including same
SEMES CO LTD0 citations57
US12540042B2Feb 3, 2026
Transfer apparatus
SEMES CO LTD0 citations47
US12227373B2Feb 18, 2025
Article transport vehicle, rail assembly, and article transport system including the same
SEMES CO LTD0 citations45