Inventor
Chen ya-ming
US5 patents
Patents
5 patentsUS12341009B2Jun 24, 2025
Variable hardness amorphous carbon mask
TOKYO ELECTRON LTD0 citations60
US12300468B2May 13, 2025
Method of uniformity control
TOKYO ELECTRON LTD0 citations60
US12217935B2Feb 4, 2025
Plasma processing methods using multiphase multifrequency bias pulses
TOKYO ELECTRON LTD0 citations59
US12040176B2Jul 16, 2024
Technologies for high aspect ratio carbon etching with inserted charge dissipation layer
TOKYO ELECTRON LTD0 citations59
US12009211B2Jun 11, 2024
Method for highly anisotropic etching of titanium oxide spacer using selective top-deposition
TOKYO ELECTRON LTD0 citations58