Inventor

VENTZEK PETER LOWELL GEORGE

US21 patents

⚠️ This page may combine multiple inventors who share the name “VENTZEK PETER LOWELL GEORGE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VENTZEK PETER LOWELL GEORGE

TOKYO ELECTRON LTD

Balanced RF resonant antenna system

Remote source pulsing with advanced pulse control

Balanced resonator source for plasma processing

Apparatus for edge control during plasma processing

Pulsed capacitively coupled plasma processes

Cyclic low temperature film growth processes

Hard mask deposition using direct current superimposed radio frequency plasma

Plasma processing with broadband RF waveforms

Method of uniformity control

Plasma processing with broadband RF waveforms

Plasma processing methods using multiphase multifrequency bias pulses

System and method to measure ion properties in a plasma system

Etching metal during processing of a semiconductor structure

Equipment and method for improved edge uniformity of plasma processing of wafers

Non-intrusive method for 2D/3D mapping plasma parameters

Plasma processing apparatus with tunable electrical characteristic

Plasma processing with magnetic ring X point

ALD process with plasma treatment

Plasma processing with radio frequency (RF) source and bias signal waveforms

Topographic selective deposition

MOTOROLA INC

Process of forming a semiconductor device