Inventor
KIM SOUK
KR13 patents
⚠️ This page may combine multiple inventors who share the name “KIM SOUK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
12 patentsUS10373796B2Aug 6, 2019
Method of inspecting wafer using electron beam
SAMSUNG ELECTRONICS CO LTD2 citations68
US9583402B2Feb 28, 2017
Method of manufacturing a semiconductor device using semiconductor measurement system
SAMSUNG ELECTRONICS CO LTD2 citations68
US12110938B2Oct 8, 2024
Vibration isolation table for semiconductor equipment and vibration isolation table system including the same
SAMSUNG ELECTRONICS CO LTD0 citations61
US11181831B2Nov 23, 2021
Methods of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations59
US12385946B2Aug 12, 2025
Method of inspecting tip of atomic force microscope and method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations58
US11004712B2May 11, 2021
Method of inspecting semiconductor wafer, inspection system for performing the same, and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD1 citations58
US12593659B2Mar 31, 2026
Spectroscopic device, spectroscopic method using the same, and method of fabricating semiconductor memory device using the same
SAMSUNG ELECTRONICS CO LTD0 citations50
US9417055B2Aug 16, 2016
Apparatus for measuring thickness of thin film, system including the apparatus, and method for measuring thickness of thin film
SAMSUNG ELECTRONICS CO LTD0 citations48
US12362138B2Jul 15, 2025
Method of operating scanning electron microscope (SEM) and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations47
US12092656B2Sep 17, 2024
Test apparatus and test method thereof
SAMSUNG ELECTRONICS CO LTD0 citations47
US11017525B2May 25, 2021
Semiconductor pattern detecting apparatus
SAMSUNG ELECTRONICS CO LTD0 citations47
US10410937B2Sep 10, 2019
Optical measuring method for semiconductor wafer including a plurality of patterns and method of manufacturing semiconductor device using optical measurement
SAMSUNG ELECTRONICS CO LTD0 citations37