Inventor
BIRX DANIEL L
US26 patents
⚠️ This page may combine multiple inventors who share the name “BIRX DANIEL L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
13 patentsUS6566667B1May 20, 2003
Plasma focus light source with improved pulse power system
CYMER INC185 citations99
US6064072AMay 16, 2000
Plasma focus high energy photon source
CYMER INC190 citations99
US5729562AMar 17, 1998
Pulse power generating circuit with energy recovery
CYMER INC241 citations99
US6452199B1Sep 17, 2002
Plasma focus high energy photon source with blast shield
CYMER INC134 citations98
US5936988AAug 10, 1999
High pulse rate pulse power system
CYMER INC154 citations98
US6566668B2May 20, 2003
Plasma focus light source with tandem ellipsoidal mirror units
CYMER INC131 citations97
US6151346ANov 21, 2000
High pulse rate pulse power system with fast rise time and low current
CYMER INC89 citations97
US6541786B1Apr 1, 2003
Plasma pinch high energy with debris collector
CYMER INC73 citations96
US5940421AAug 17, 1999
Current reversal prevention circuit for a pulsed gas discharge laser
CYMER INC77 citations96
US6442181B1Aug 27, 2002
Extreme repetition rate gas discharge laser
CYMER INC56 citations95
US5914974AJun 22, 1999
Method and apparatus for eliminating reflected energy due to stage mismatch in nonlinear magnetic compression modules
CYMER INC83 citations94
US6240112B1May 29, 2001
High pulse rate pulse power system with liquid cooling
CYMER INC32 citations92
US6028872AFeb 22, 2000
High pulse rate pulse power system with resonant power supply
CYMER INC53 citations92
US ENERGY
5 patentsUS4928020AMay 22, 1990
Saturable inductor and transformer structures for magnetic pulse compression
US ENERGY88 citations94
US6728284B1Apr 27, 2004
High power solid state laser modulator
US ENERGY17 citations83
US5124629AJun 23, 1992
Post regulation circuit with energy storage
US ENERGY12 citations73
US4730166AMar 8, 1988
Electron beam accelerator with magnetic pulse compression and accelerator switching
US ENERGY18 citations71
US4646027AFeb 24, 1987
Electron beam accelerator with magnetic pulse compression and accelerator switching
US ENERGY12 citations71