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Inventor
LAGANZA JOSEPH L
US
4 patents
⚠️ This page may combine multiple inventors who share the name “LAGANZA JOSEPH L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PERKIN ELMER CORP
2 patents
US4719705A
Jan 19, 1988
Reticle transporter
PERKIN ELMER CORP
40 citations
90
US4530635A
Jul 23, 1985
Wafer transferring chuck assembly
PERKIN ELMER CORP
32 citations
90
SVG LITHOGRAPHY SYSTEMS INC
1 patent
US4986007A
Jan 22, 1991
Reticle frame assembly
SVG LITHOGRAPHY SYSTEMS INC
23 citations
90
ASML HOLDING NV
1 patent
US7136152B2
Nov 14, 2006
Method for bonding a pellicle to a patterning device and patterning device comprising a pellicle
ASML HOLDING NV
2 citations
61