Inventor
ENGELBRECHT OREST
US8 patents
⚠️ This page may combine multiple inventors who share the name “ENGELBRECHT OREST”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SVG LITHOGRAPHY SYSTEMS INC
4 patentsUS4973217ANov 27, 1990
Wafer handling system
SVG LITHOGRAPHY SYSTEMS INC35 citations91
US4986007AJan 22, 1991
Reticle frame assembly
SVG LITHOGRAPHY SYSTEMS INC23 citations90
US5193972AMar 16, 1993
Wafer handling system
SVG LITHOGRAPHY SYSTEMS INC19 citations72
US5085558AFeb 4, 1992
Wafer handling system
SVG LITHOGRAPHY SYSTEMS INC14 citations72
PERKIN ELMER CORP
4 patentsUS4846626AJul 11, 1989
Wafer handling system
PERKIN ELMER CORP25 citations91
US4719705AJan 19, 1988
Reticle transporter
PERKIN ELMER CORP40 citations90
US4530635AJul 23, 1985
Wafer transferring chuck assembly
PERKIN ELMER CORP32 citations90
US4362384ADec 7, 1982
Means for providing uniform illumination to a light sensitive element
PERKIN ELMER CORP6 citations62