Inventor
ITO NATSUKO
JP16 patents
⚠️ This page may combine multiple inventors who share the name “ITO NATSUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
10 patentsUS6184489B1Feb 6, 2001
Particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particles
NEC CORP119 citations99
US5870189AFeb 9, 1999
Particle monitor and particle-free recessing system with particle monitor
NEC CORP63 citations96
US6423176B1Jul 23, 2002
Particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particles
NEC CORP27 citations92
US6042650AMar 28, 2000
Processing apparatus for fabricating LSI with protected beam damper
NEC CORP23 citations92
US5861951AJan 19, 1999
Particle monitoring instrument
NEC CORP30 citations92
US5747991AMay 5, 1998
Capacitance type acceleration sensor
NEC CORP25 citations92
US7006682B1Feb 28, 2006
Apparatus for monitoring particles and method of doing the same
NEC CORP11 citations84
US6115120ASep 5, 2000
System and method for detecting particles produced in a process chamber by scattering light
NEC CORP18 citations84
US6284049B1Sep 4, 2001
Processing apparatus for fabricating LSI devices
NEC CORP9 citations73
US6306770B1Oct 23, 2001
Method and apparatus for plasma etching
NEC CORP3 citations63